バッファ装置

Buffer device

Abstract

PROBLEM TO BE SOLVED: To increase storage capacity by integrally-forming the whole rack part so that a plurality of stages formed out of a plurality of rolls and serving as a conveyor may be overlapped and mounted on the rack, moving it while controlling a vertical position, and using the lowest stages of the respective rack stages as the conveyor for conveyance in receiving and delivering a processed substrate. SOLUTION: A processed substrate for receiving is placed on a roller 151. If a device 100 is not performing delivering or receiving operation, it is checked whether or not any stage of a rack stage 110A is vacant. If vacant, it is checked whether or not the lowest stage for conveyance of the rack stage 110B is vacant and placed at the height of a receiving position. If the lowest stage of the rack stage 110B is not placed at the height of a receiving position, the lowest stage is moved at the height of the receiving position by vertical movement of the rack stage 110B by a vertical moving part 130. The receiving stage of the processed substrate of the rack stage 110A is selected and moved at the height of the receiving position. After the processed substrate is conveyed in the prescribed position on the selected stage by rotation driving of a roller 151, the lowest stage roller 113 of the rack stage 110B, and the roller of selected stages of the rack stage 110A, driving of the respective rollers is stopped.
(57)【要約】 【課題】 できるだけ場所をとらず、所定の時間経過後 に処理基板を外部へ確実に送り出すことができるバッフ ァ装置を提供する。 【解決手段】 処理基板をほぼ水平な状態で搬送でき、 且つ、その上に静止して置き、保管することができる、 複数のロールからなるコンベア兼用の段を、複数重ねて 棚状に設けた棚部と、棚部全体を一体として、上下方向 にその位置を管理しながら移動する上下移動部と、処理 基板の受け入れを検知するセンサー部と、棚部の各段の 処理基板の有無の管理と、保管されている処理基板をコ ンベア搬送する各段の動作における時間管理、棚段の上 下動作における時間管理を行い、且つ、各部の動作を関 連つけて制御する制御部とを備え、処理基板の受け入れ の際には、処理基板が置かれていない、所定の空の段の 位置を、受け入れする処理基板の高さに合わせて、処理 基板を内部へ受け入れするもので、処理基板の送り出し の際には、所定の時間保管された処理基板の置かれてい る段の位置を、送り出す位置に合わせて、処理基板を外 部へ送り出すものである。

Claims

Description

Topics

Download Full PDF Version (Non-Commercial Use)

Patent Citations (0)

    Publication numberPublication dateAssigneeTitle

NO-Patent Citations (0)

    Title

Cited By (3)

    Publication numberPublication dateAssigneeTitle
    JP-2007001716-AJanuary 11, 2007Shinko Electric Co Ltd, 神鋼電機株式会社Device for and method of storing workpiece
    JP-2007161400-AJune 28, 2007Hitachi High-Tech Instruments Co Ltd, 株式会社日立ハイテクインスツルメンツArticle carrying device
    KR-101209771-B1December 07, 2012주식회사 제우스버퍼 장치와 이를 구비하는 반도체 공정 시스템, 및 이를 이용한 웨이퍼의 임시 보관 방법