積層型圧電アクチュエータの製造方法

Manufacture of laminated piezoelectric actuator

Abstract

PROBLEM TO BE SOLVED: To manufacture a laminated piezoelectric actuator having an excellent thermal resistance and an excellent response by respectively using an adhesive having a high thermal resistance and a large elastic modulus, insulating materials having a high thermal resistance and external materials having a high thermal resistance. SOLUTION: After drying green sheet provided with internal electrode layers 4, a laminated body is fabricated by stacking sixty green sheets 3 and protective layer 1, 2 on the top and the bottom surface respectively. Next, a joint body is formed by applying an adhesive 5 on the laminated body. The adhesive is made of amorphous glass in a PbO-SiO2-Al2O3 system. The adhesive has a thermal resistant temperature of more than 150 deg.C and an elastic module of more than 5×104 Mpa after heating treatment. Next, the laminated body is covered every other layers using internal electrode levers, Thus an insulation layers 6 are formed. The insulation materials are made of amorphous glass in ZnO-Al2O system. After heating treatment, the insulation materials have a thermal resistant temperature of more than 150 deg.C. Finally, an external electrode 7 is formed so as to apply power by covering the insulation layers 6.
(57)【要約】 (修正有) 【課題】例えば、圧電特性を有する圧電板の両面に内部 電極を形成した圧電板を接着剤を介して多数枚積み重 ね、焼き付けして積層体を形成する工程,該積層体に絶 縁層及び外部電極を形成する工程において、耐熱性及び 応答性に優れた圧電アクチュエータの製造方法を提供す る。 【解決手段】耐熱温度が150℃以上のZnO−Al 2 O 3 −B 2 O 3 −SiO 2 系ガラス絶縁材を形成し、更 に、外部電極材付与部に、耐熱温度が150℃以上で、組 成が導体のAgと接合成分のBi 2 O 3 −B 2 O 3 −PbO 系ガラスからなる外部電極材を形成した圧電アクチュエ ータを得る。

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Cited By (8)

    Publication numberPublication dateAssigneeTitle
    EP-2587563-A2May 01, 2013Kyocera CorporationÉlément piézoélectrique multicouche et dispositif d'injection l'utilisant
    JP-2008277855-ANovember 13, 2008Denso Corp, 株式会社デンソー積層型圧電体素子及びその製造方法,並びにインジェクタ
    JP-2011109119-AJune 02, 2011Kyocera Corp, 京セラ株式会社積層型圧電素子およびこれを用いた噴射装置
    JP-2012204423-AOctober 22, 2012Ngk Insulators Ltd, 日本碍子株式会社Green laminate
    KR-101081740-B1November 09, 2011연세대학교 산학협력단Circuit device comprising piezoelectric ceramic device and method for manufacturing the device
    US-7341639-B2March 11, 2008Epcos AgElectroceramic component comprising a plurality of contact surfaces
    US-8339017-B2December 25, 2012Kyocera CorporationMulti-layer piezoelectric element and injection apparatus using the same
    US-8378554-B2February 19, 2013Kyocera CorporationMulti-layer piezoelectric element and injection apparatus using the same